| Customization: | Available |
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| Warranty: | 1 Year |
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Factory Price High Temperature Semiconductor Wafer Tempering Furnace
Technical Specifications for Vacuum Annealing Furnace |
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| Working temperature | 1200ºC (Heating wires)
1350ºC (Molybdenum strap heaters ) 1600ºC (MoSi heating elements) 2200ºC (Graphite heating element) |
| Furnace chamber insulation | 1200ºC (Ceramic fiber board)
1350ºC (Molybdenum sheets and Stainless steel sheets ) 1600ºC (Ceramic fiber board) 2200ºC (Carbon felt) |
| Furnace structure | - Double layers Carbon steel casing with water cooling system to ensure the surface below 30ºC
- Furnace door inside is polished stainless steel |
| Working voltage | 380V 50HZ 3P (or according to your standard) |
| Max. power | 1KW-240KW |
| Temperature controlling | - PLC or PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor. - 51 programmable segments for precise control of heating rate, cooling rate and dwell time. - Built in PID Auto-Tune function with overheating & thermocouple broken protection. - Over temperature protection and alarm allows for operation without an attendant. |
| Optional of temperature controlling | - Software (Furnace can be operated by PC by installing a control software ) - Touch screen temperature controller |
| Temperature accuracy | ±1ºC |
| Heating rate | Heating rate<20 ºC/min |
| Thermocouple | 1200ºC (S type)
1350ºC (S type) 1600ºC (B type) 2200ºC (W-Re type) |
| Maximum vacuum | 7×10-4Pa |
| Vacuum pump | - 10Pa with Double stages rotary pump
- 7×10-1Pa with Mechanical pump and Roots pump - 7×10-3Pa with Mechanical pump and Diffusion pump - 7×10-4Pa with Mechanical pump and Molecular pump |
| Warranty | - One year limited warranty with lifetime support. (Consumable parts such as heating elements and crucibles are not covered by the warranty, please order the replacement at related products) - ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of One Year Limited Warranty. |
| Certifications | CE |
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