High Temperature 1200c Lab PECVD Furnace

• After-sales Service: Overseas After-Sales Service Provided
• Warranty: 1 Year
• Application: Industry, School, Lab
• Shipping Cost: Estimated freight per unit.: about shipping cost and estimated delivery time.
• Currency: US$
• Return&refunds: You can apply for a refund up to 30 days after receipt of the products.
• Model NO.: BR-CVD
• Customized: Customized
• Certification: CE
• Structure: Desktop
• Material: Stainless Steel
• Type: Tubular Furnace
• Product Type: Pecvd Furnace
• Chamber Size: Customizable
• Max Temp.: 1200c
• Heating Elements: Quality Heating Wires
• Heating Rate: Max 20c / Min
• Max Vacuum: -0.1 MPa
• Voltage: 110V or 220V or 380V
• Temperature Control: Pid or PLC Control
• Thermocouple: K Type
• Power: as Per Your Order
• Transport Package: Strong Wooden Case Packing
• Specification: Customizable
• Trademark: Brother Furnace
• Origin: China
• HS Code: 85141990
• Production Capacity: 20000 Sets/Year
• Package Size: 65.00cm * 58.00cm * 94.00cm
• Package Gross Weight: 83.000kg

Product Description

High Temperature 1200C Lab PECVD Furnace

Brother Furnae Lab CVD tube furnace adopts high pure alumina or quartz tube, working temperature from 300ºC to 1600ºC. Adopt an advanced temperature control system, high temperature accuracy, easy operation, excellent heat-insulation effect, symmetrical temperature uniformity. Mainly used for labs of the university, research center, and production enterprise, etc.

PECVD Furnace Features:

• Max temperature:
  1200ºC (HRE Fe-Cr-Al-Mo wire)
   
• 50 segments programmable and auto control.
• Furnace structure, double layer steel dual cooling fan, the surface temperature below 50ºC.
• 304 stainless steel sealing flange.
• Adjustable flange support structure at both ends to extend furnace tube life.
• Over-temperature protection function, automatic power-off when the temperature exceeds the allowable set value.
• Safety protection Automatically power off when the furnace body leaks.
• Heating rate <=20ºC/min
• Temperature accuracy ±1 ºC
• Max vacuum -0.1MPa (Standard type)
• Max vacuum 7×10^(-5)Pa (High vacuum type)

Product Description

 

Product Parameters

PECVD Furnace Technical Specifications
Max. temperature	1200ºC  (<2 hours)
Working temperature	300-1100 ºC
Standard Temperature controlling	- PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor. - 51 programmable segments for precise control of heating rate, cooling rate and dwell time. - Built in PID Auto-Tune function with overheating & broken thermocouple broken protection. - Over temperature protection and alarm allows for operation without attendant.
Optional of Temperature controlling	-  Software (Furnace can be operated by PC by installing a control software ) -  Touch screen temperature controller
Temperature accuracy	±1ºC
Heating rate	Heating rate<15 ºC/min
Thermocouple	K type (Pt-Rh) with 99.7% purity Alumina tube
Heating element	heating wires
Max. vacuum	7×10^(-5) Pa
Furnace Chamber	There layers of ceramic fiber insulation materials - First layer: 1600ºC ceramic fiberboard. - Second layer: 1400ºC ceramic fiberboard. - Third layer: 1260ºC ceramic fiberboard.
Furnace structure	Double layer steel casing with dual cooling fan, surface temperature below 60 ºC.
Vacuum system	- Double stage rotary vane vacuum pump with a magnetic valve to prevent the oil absorbed into tube. - Self-expansion type double silicon ring flange, 304 stainless steel HCP. - Needle valve + Mechanical vacuum gauge + Discharge valve
Warranty	- One year limited warranty with lifetime support. (Consumable parts such as heating elements and crucibles are not covered by the warranty, please order the replacement at related products) - ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of a One Year Limited Warranty.
Certifications	CE

 
 

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